Fraunhofer Institute Orders AIXTRON MOCVD Tool

AIXTRON AG announced that in the fourth quarter 2008, the Fraunhofer Institute for Solar Energy Systems (ISE), Freiburg, Germany, ordered an AIX 2800G4-R MOCVD tool with automated wafer handler. The Planetary Reactor system with 8×6 inch configuration will be delivered in the fourth quarter 2009.

Funded by the BMBF and the Fraunhofer Society, the new tool will form the centerpiece of a program to develop and produce next generation triple- and multi-junction solar cells in cooperation with industrial partners.

Dr Frank Dimroth, head of the III-V Epitaxy and Solar Cells group at the Fraunhofer ISE commented, “We selected an AIXTRON MOCVD system because of its high degree of flexibility and reproducibility that is achieved with the Planetary Reactor technology. Moreover we can employ the system’s wide process window for tuning our new process technology based on compound semiconductor alloy materials. The AIX 2800G4-R will incorporate advanced in-situ monitoring technologies and we will be able to change wafer configurations flexibly up to 8.5 inch. I was impressed by the improvements which have been made in the reactor design compared to our current AIX 2600G3 system. The new AIXTRON technology allows us to transfer our R&D processes up to high-volume mass-production which is a prime target for our development project.”