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New PVD and PECVD systems support unique deposition technologies
October 17, 2013
By: DAVID SAVASTANO
Contributing Editor, Coatings World and Ink World
Applied Materials, Inc. announced new technology systems for manufacturing large size and ultra-high definition (UHD) LCD and OLED displays that meet consumer demand for greater screen performance, clarity, color and brightness. The Applied AKT-PiVot 55K DT PVD, Applied AKT-PiVot 25K DT PVD and Applied AKT 55KS PECVD systems extend Applied’s leadership in metal oxide (MO) films and technologies for smaller, faster thin film transistors (TFTs) required to create high-resolution displays. Through precision materials engineering and productivity innovations, these PVD and PECVD systems provide an optimized, cost-effective solution for volume production of future MO-enabled displays. MO-based TFTs help enable low-power, high-resolution smart phones and tablets as well as some OLED TV technologies. Future 4K TVs are also expected to adopt MO TFTs. The uniformity and particle control of Applied’s PVD and CVD systems help customers deliver these new display technologies with high yield in mass production. “Our new PVD and PECVD systems will accelerate display industry roadmaps by enabling customers to transition to MO materials using proven technologies,” said Ali Salehpour, senior vice president and general manager, Applied Global Services and Growth Markets. “We worked closely with customers to develop these solutions to address their critical uniformity, particle control and stability challenges, clearing major implementation hurdles, especially with regard to OLED. We can support the various product strategies of our customers by expanding these solutions to different substrate sizes, allowing for multiple technology paths for manufacturing large-area TVs or energy-efficient screens for mobile devices.”
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