Shanghai University Chooses AIXTRON for Graphene, Nanotube Processing

AIXTRON SE announced that Shanghai University has ordered a BM R&D reactor to be used by its Sino-Sweden Microsystem Integration Technology Center (SMIT). AIXTRONs highly flexible R&D system for manufacturing carbon nanotubes and graphene has already shown excellent results at numerous customer sites worldwide.

“We will be launching extensive new research into the application of nanotubes and graphene using the BM capabilities in thermal- and plasma-based chemical vapor deposition,” said Prof. Johan Liu, who is leading the graphene/nanotube research at SMIT. “We chose the AIXTRON system as we achieved excellent results in our longstanding work with the BM reactor at Chalmers University in Sweden.”

Prof. Liu at SMIT will be developing next generation thermal interface/dissipating materials, heat spreaders, multi-chip interconnects and through silicon vias (TSV) for semiconductor chip packaging using the BM reactor.