STMicroelectronics Leads European Research Project to Develop Next-Generation Optical MEMS

STMicroelectronics has revealed its leadership of Lab4MEMS II, an extension that builds on the continuing success of the existing Lab4MEMS project, announced in April 2013.
 
Lab4MEMS II focuses on Micro-Opto-Electro-Mechanical Systems (MOEMS) that merge MEMS with micro-optics to sense or manipulate optical signals using integrated mechanical, optical and electrical systems, while the original project maintains its emphasis on developing a pilot line for next-generation MEMS devices augmented with such advanced technologies as piezoelectric or magnetic materials and 3D packaging. Like its sister project, Lab4MEMS II is being launched by the European Nanoelectronics Initiative Advisory Council (ENIAC) Joint Undertaking (JU), a public-private partnership in nanoelectronics.
 
Lab4MEMS II is a €26 million ($30 million) project with 20 industrial, academic, and research partners spread across nine European countries. Building on the established foundation and successes of the first Lab4MEMS project, the extension features ST as the coordinating partner, offering its complete range of manufacturing, technical and organizational competencies to guide Europe’s efforts to secure leadership in high-potential MOEMS.
 
ST has almost 1,000 MEMS-related patents, more than eight billion devices shipped, and extensive in-house production capabilities currently producing more than four million MEMS devices per day.
 
MOEMS is the perfect platform for future valuable commercial products, such as optical switches, micro-mirror devices and dynamic displays, bi-stable devices, and optical shutters useful in micro-projectors, laser micro-scanners, new-generation Human Machine Interfaces, and micro-spectrometers.
 
“MOEMS is a promising multi-feature technology for miniaturization of critical optical systems that will benefit society, consortium members and stakeholders, including ENIAC member states by creating valuable knowledge-based employment opportunities, increasing long-term prosperity, and enabling products that benefit society,” said Roberto Zafalon, European programs manager, R&D and public affairs, STMicroelectronics.
 
The Pilot Line for Lab4MEMS II will expand ST’s operational 200 mm-wafer manufacturing facility in Agrate Brianza for even higher volumes, while adding optical technologies to the mix. Moreover, it would increase the know-how on those strategic enabling technologies while combining scientific skills and the ability to design and manufacture a wide range of smart micro- and nano-systems on silicon.
 
In addition to ST, partners in the Lab4MEMS II project are: the Politecnico di Torino and di Milano; Consorzio Nazionale Interuniversitario per la Nanoelettronica; CNR-IMM MDM; Commissariat Al Energie Atomique Et Aux Energies Alternatives; Arkema SA; University of Malta; Okmetic Oyj; MURATA Electronics; VTT Memsfab Ltd; Teknologian tutkimuskeskus VTT; Aalto University; KLA-Tencor ICOS; University POLITEHNICA of Bucharest – CSSNT; Instytut Technologii Elektronowej; Warsaw; Stiftelsen SINTEF; Polewall AS; and Besi Austria GmbH.