SAFC Hitech Launches Metalorganic Bulk Vapor Distribution System for Compound Semiconductor Manufacturing

SAFC Hitech, a focus area within SAFC(R), a member of the Sigma-Aldrich Group, announced the introduction of EpiVapor, a metalorganic vapor phase distribution system for compound semiconductor manufacturing. EpiVapor eliminates the need for localized tool bubblers and TCU’s by delivering vapors from highly volatile and sensitive pyrophoric liquids directly to MOCVD systems, allowing manufacturers to realize considerable cost savings.

An extension of SAFC Hitech’s industry-proven EpiFill bulk liquid delivery technology, EpiVapor provides gas phase delivery of chemical vapors such as trimethylgallium (TMG) and trimethylaluminum (TMA) directly to multiple deposition tools in a safe, reproducible fashion. Flexible enough to connect to up to eight independent tools, the continuous delivery of metalorganic vapors offers a truly uninterrupted solution in the fabrication of semiconductor devices. The EpiVapor’s design ensures precursor flux stability in hydrogen (or other inert gas) carrier gas throughout the life of the ampoule, while adjustable parameters ensure that processes can be run at full capacity without stoppages to change out the tool bubblers. This optimizes process efficiency, reduces operational costs and increases safety, without compromising ultra high performance levels.

“As the MOCVD industry moves into high volume manufacturing, overall cost of ownership (COO) has become an important consideration in cost control,” commented SAFC Hitech president Barry Leese. “Reducing the cost of transporting metalorganic chemicals to the tool plays a significant part in reducing overall COO. In addition, the reliable, flexible and highly controllable dosimetry of organometallic precursors is of paramount importance in production environments where downtime is prohibitively expensive. The success we have seen with our EpiFill technology for pyrophoric materials motivated us to develop a vapor distribution system. With the introduction of the EpiVapor system we are reducing both system down time and the amount of hardware used per tool, eliminating the need of multiple Temperature Controller Units and enabling automation and bulk chemical change out in an arrangement that can be tailored for the specific requirements of the customer.”